February 2021
02 Feb 2021 — Canon announced today the launch in Japan of the FPA-5520iV LF Option for back-end process semiconductor lithography systems, featuring an i-line stepper with a ...
October 2020
27 Oct 2020 — Canon announced today the launch in Japan of the FPA-3030i5a, the newest entry in the company’s lineup of i-line stepper semiconductor lithography systems that support ...
June 2020
23 Jun 2020 — Canon announced today the launch in Japan of the FPA-8000iW, the first Canon semiconductor lithography system to support manufacturing using large panels that are ...